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Temescal UEFC-6100 Deposition System with Auratus
The Temescal UEFC-6100Deposition System with Auratus represents Temescal ultimate high-throughput platform for lift-off orientated evaporation. This system is designed to support the metalization of 25 -200 mmm wafers per load via high capacity e-beam evaporation.
HIGH VACUUM PUMP Product Chamber – One (1) CTI Model On-Board 500
- Temescal Control System (TCS), providing Auto, Manual, and Service modes plus process datalogging
- Security code-based access for multiple classes of users
- TCS-based process variable monitoring (PVM), allowing user to set tolerance alarms for critical process variables
- Inficon XTC/3 or IC/6 deposition controller
- Temescal 4- or 6-pocket PopTop turret source
- Temescal CV-12SLX (12 kW) electron beam power supply
- Temescal EBC-Controller
Temescal Control System
The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging.
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