Thermal Evaporator Single chamber Sliding Door Type

$ P.O.A.

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Thermal Evaporator Single chamber Sliding Door Type by Korea Kiyon

Korea Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.

Basic composition

Process Chamber Dimension 450(L)X355(H)X(450)
Sample Size Piece to Max 170mm * 170mm Glass
Chamber Ultimate Pressure Below than 3.0 x 10-7 Torr
Chamber Working Pressure Below than 5.0 x 10-6 Torr within 30 Minutes
Film Thickness Uniformity <+/-5% within 170mm * 170mm Glass
Front Door for Sample Loading & Source Refill In Glovebox Condition
Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox)
System Fully Automation Control by PC Control Available
System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) :
Auto Pumping, Auto Venting, Auto System Shut Down
Auto Deposition Control & Co-deposition Process Available
Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available

Model: KESD 170 – 2M2O (2P)

Model: KESD 170 – 2M2O (4P)

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