Thermal Evaporator Single chamber Sliding Door Type
$ P.O.A.
Please contact us for price & delivery time.
Thermal Evaporator Single chamber Sliding Door Type by Korea Kiyon
Korea Kiyon offers customized Thermal Evaporator system integrated with its in-house designed Glovebox provides suitable for various applications.
Basic composition
| Process Chamber Dimension | 450(L)X355(H)X(450) |
|---|---|
| Sample Size | Piece to Max 170mm * 170mm Glass |
| Chamber Ultimate Pressure | Below than 3.0 x 10-7 Torr |
| Chamber Working Pressure | Below than 5.0 x 10-6 Torr within 30 Minutes |
| Film Thickness Uniformity | <+/-5% within 170mm * 170mm Glass |
| Front Door for Sample Loading & Source Refill In Glovebox Condition | |
| Rear Side Door for Chamber Maintenance & Cleaning (Without Destroying The Condition of The Glovebox) | |
| System Fully Automation Control by PC Control Available | |
| System Semiauto Control & Manual Control by PLC Based Touch Control (10.5“ Touch Panel) : Auto Pumping, Auto Venting, Auto System Shut Down |
|
| Auto Deposition Control & Co-deposition Process Available | |
| Sample Heating (Up to 300 ℃) / Cooling ( Down to 5 ℃ ) Available | |
Model: KESD 170 – 2M2O (2P)
Model: KESD 170 – 2M2O (4P)
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