Temescal UEFC-6100 Deposition System with Auratus
$ P.O.A.
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Temescal UEFC-6100 Deposition System with Auratus
The Temescal UEFC-6100Deposition System with Auratus represents Temescal ultimate high-throughput platform for lift-off orientated evaporation. This system is designed to support the metalization of 25 -200 mmm wafers per load via high capacity e-beam evaporation.
HIGH VACUUM PUMP Product Chamber – One (1) CTI Model On-Board 500
Product Chamber – One (1) CTU Model On-Board 10F
The product chamber includes one (1) heavy duty 20-inch cryogenic pump & VAT pendulum valve
(NW 320 flange) and one (1) heavy duty 12 inch cryogenic pump & VAT pendulum valve (NW 250 flange)
each with integrated auto-regeneration capability. These are mounted on the rear wall of the product chamber
with noted isolation valves. They include RS232 interface and set point relays, microprocessor regeneration
controls and rack mount remote keypad displays. Includes the following specified options:
* One(1) 208 V 50/60Hz 9700A series water-cooled compressor
* One (1) 208 V 50/60Hz 9600 series water-cooled compressor
* Two (2) Silicon Diode temperature indicators
* Two (2) Configuration Kits, 50 ft
HIGH VACUUM PUMP Source Chamber – CTI Model CT-10F On-Board
The source chamber includes a heavy duty 12-inch cryogenic pump & VAT pendulum valve (NW 250 flange)
with integrated automatic regeneration capability. This is mounted on the load-locked source chamber with noted
isolation valve. Base unit includes RS232 interface and two set point relays, microprocessor regeneration control
and rack mount remote keypad display. Includes the following specified options: * One (1) 208V 50/60Hz 9600 series
water-cooled compressor
* Silicon Diode temperature indicator
* Configuration Kit, 50 ft.
Standard Features
System Control
- Temescal Control System (TCS), providing Auto, Manual, and Service modes plus process datalogging
- Security code-based access for multiple classes of users
- TCS-based process variable monitoring (PVM), allowing user to set tolerance alarms for critical process variables
- Inficon XTC/3 or IC/6 deposition controller
E-Beam
- Temescal 4- or 6-pocket PopTop turret source
- Temescal CV-12SLX (12 kW) electron beam power supply
- Temescal EBC-Controller
Temescal Control System
The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. Operating in any of three password-protected modes, the TCS also offers process variable monitoring, process and historical trend tracking, and process data logging.
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