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IS 320FX Cryopump by Edwards
The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today’s Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you’ve come to expect.
- Specifically designed for ion implant applications
- Optimized for tool throughput
- Intelligent “self adjusting” technology
- Lower cost of ownership
- Increased uptime
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